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trends timeline for %E5%9B%BD%E5%AE%B6%E3%83%8A%E3%83%8E%E3%83%86%E3%82%AF%E3%83%8E%E3%83%AD%E3%82%B8%E3%83%BC%E3%83%BB%E3%82%A4%E3%83%8B%E3%82%B7%E3%82%A2%E3%83%86%E3%82%A3%E3%83%96%20-%20National%20Nanotechnology%20Initiative