Similar to シャロートレンチアイソレーション

Silicon on insulator

Ohmic contact

Copper interconnects

Thermal oxidation

11 (number)

13 (number)

5 nm process

High-κ dielectric

RCA clean

System in a package

Stranski–Krastanov growth

SU-8 photoresist

System on a chip

Ashing

Ion implantation

Chemical milling

Wafer (electronics)

Oil immersion

Etching

Etching (microfabrication)

Epitaxy

Chemical-mechanical polishing

Chemical vapor deposition