Similar to 極端紫外線リソグラフィ

Riso Kagaku Corporation

5 nm process

High-kappa dielectric

RCA clean

System in a package

Stranski–Krastanov growth

System on a chip

Ashing

Ion implantation

Chemical milling

Wafer (electronics)

Silicon on insulator

Etching

Etching (microfabrication)

Epitaxy

Ohmic contact